ANSYS (=ANalysis SYStem) finite-element method (FEM) program system:
- various documents
- historic trivia
Finite Element Analysis (FEA):
- https://www.ansys.com/de-de
- https://en.wikipedia.org/wiki/Ansys
- https://de.wikipedia.org/wiki/Ansys_(Software)
FEA simulation on MEMS sensor devices: